Jin Wang

TL;DR: In this paper, a fault detection method using the k-nearest neighbor rule (FD-kNN) is developed for the semiconductor industry, which makes decisions based on small local neighborhoods of similar batches, and is well suited for multimodal cases.

TL;DR: A new process monitoring method is proposed that is composed of a preanalysis step that first roughly identifies various clusters in a historical data set and then precisely isolates normal and abnormal data clusters by the k-means clustering method and a fault diagnosis method based on fault directions in pairwise FDA.

TL;DR: A new subspace identification algorithm is proposed that gives consistent model estimates under the errors-in-variables (EIV) situation and is demonstrated using a simulated process and a real industrial process for model identification and order determination.

TL;DR: In this paper, a hierarchical fab-wide control framework with the integration of 300mm equipment and metrology tools and highly automated material handling system is proposed, and relevant existing run-to-run technology is reviewed and analyzed in the fabwide control context.

TL;DR: In this work, data-driven valve stiction models are reviewed, a stiction detection method is proposed based on curve fitting of the output signal of the first integrating component after the valve, and a metric that is called the stiction index (SI) is introduced, based on the proposed method to facilitate the automatic detection of valveStiction.