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Neal B. Gallagher

Publications -  20
Citations -  1692

Neal B. Gallagher is an academic researcher. The author has contributed to research in topics: Fault detection and isolation & Analyte. The author has an hindex of 12, co-authored 18 publications receiving 1606 citations.

Papers
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The process chemometrics approach to process monitoring and fault detection

TL;DR: The state-of-the-art of process chemometrics and current trends in research and applications are reviewed.
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A comparison of principal component analysis, multiway principal component analysis, trilinear decomposition and parallel factor analysis for fault detection in a semiconductor etch process

TL;DR: Multivariate statistical process control tools have been developed for monitoring a Lam 9600 TCP metal etcher at Texas Instruments and the strengths and weaknesses of the methods are discussed, along with the relative advantages of each of the sensor systems.
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Development and Benchmarking of Multivariate Statistical Process Control Tools for a Semiconductor Etch Process: Improving Robustness through Model Updating

TL;DR: In this paper, a multivariate statistical process control tools have been developed for monitoring and fault detection on a Lam 9600 metal etcher, which is used in the manufacturing process.
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Curve resolution for multivariate images with applications to TOF-SIMS and Raman

TL;DR: Robust initialization and introduction of functional constraints tested here are necessary steps towards the final objective of providing a simple methodology for constraining factors in a general fashion so that knowledge of the physics and chemistry can be easily incorporated in to any MCR decomposition.
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A new approach for interactive self-modeling mixture analysis

TL;DR: In this paper, a stepwise maximum angle calculation (SMAC) algorithm is proposed to resolve spectra with wide and narrow peaks properly and minimise baseline problems by resolving them as separate components.