Journal ArticleDOI
Review of nanomanipulators for nanomanufacturing
E. Du,Hong-Liang Cui,Zhenqi Zhu +2 more
TLDR
A review of the state-of-the-art of nanomanipulator concepts, designs and practices in research, prototyping and fabrication of nanodevices can be found in this article.Abstract:
This paper reviews the state-of-the-art of nanomanipulator concepts, designs and practices in research, prototyping and fabrication of nanodevices. Limitations of existing nanomanipulation systems in use have been examined including the device sizes of orders of magnitude too large for in situ applications and parallel applications in nanomanufacturing. Design strategies, mechanisms and practical solutions have been investigated for nanaomanipulation with multiple degrees of freedom, needed for manufacturing complex nanodevices and nanosystems. Both macro- and micro-scale nanomanipulator designs and practices are examined.read more
Citations
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Synthesis of multi-degree of freedom, parallel flexure system concepts via freedom and constraint topology (FACT). Part II: Practice
TL;DR: In this paper, the authors demonstrate how to use freedom and constraint topology (FACT) to synthesize concepts for the multi-degree of freedom, parallel precision flexure systems that fall within the scope of Part I.
Journal Article
Nanorobots, NEMS, and Nanoassembly
TL;DR: In this paper, the focus is on nanoassembly by manipulation with scanning probe microscopes (SPMs), which is a relatively well established process for prototyping nanosystems.
Journal ArticleDOI
A SOI-MEMS-based 3-DOF planar parallel-kinematics nanopositioning stage
TL;DR: In this article, a parallel-kinematic mechanism (PKM) was proposed for 3D DOF (3D-DOF) micro-electro-mechanical system.
Journal ArticleDOI
An XYZ Parallel Kinematic Flexure Mechanism With Geometrically Decoupled Degrees of Freedom
TL;DR: In this paper, a constraint-based design of a parallel kinematic flexure mechanism that provides highly decoupled motions along the three translational directions (X, Y, and Z) was presented.
Emerging Challenges of Microactuators for Nanoscale Positioning, Assembly, and
TL;DR: A summary of the state-of-the-art in the design, fabrication, and application of microactuators for nanoscale manufacturing and assembly can be found in this paper.
References
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Journal ArticleDOI
Atomic force microscope
TL;DR: The atomic force microscope as mentioned in this paper is a combination of the principles of the scanning tunneling microscope and the stylus profilometer, which was proposed as a method to measure forces as small as 10-18 N. As one application for this concept, they introduce a new type of microscope capable of investigating surfaces of insulators on an atomic scale.
Journal ArticleDOI
Nanotubes as nanoprobes in scanning probe microscopy
TL;DR: In this article, it was shown that carbon nanotubes might constitute well defined tips for scanning probe microscopy, and they were attached to the silicon cantilevers of conventional atomic force microscopes.
Book
Nanosystems: Molecular Machinery, Manufacturing, and Computation
TL;DR: This book discusses molecular manufacturing systems, nanoscale Structural Components, and Nanomechanical Computational Systems, as well as some of the techniques used in macromolecular engineering and its applications.
Journal ArticleDOI
Carbon Nanotube Flow Sensors
TL;DR: The report that the flow of a liquid on single-walled carbon nanotube bundles induces a voltage in the sample along the direction of the flow is highlighted, which highlights the device potential for nanotubes as sensitive flow sensors and for energy conversion.
Journal ArticleDOI
Assembly of nanodevices with carbon nanotubes through nanorobotic manipulations
TL;DR: The main technologies for the assembly of nanodevices through nanomanipulations with scanning probe microscopes and nanorobotic manipulators are overviewed, focusing on that of nanotubes.