Journal ArticleDOI
A review of micropumps
Daniel J. Laser,Juan G. Santiago +1 more
TLDR
In this article, the authors survey progress over the past 25 years in the development of microscale devices for pumping fluids and attempt to provide both a reference for micropump researchers and a resource for those outside the field who wish to identify the best micropumps for a particular application.Abstract:
We survey progress over the past 25 years in the development of microscale devices for pumping fluids. We attempt to provide both a reference for micropump researchers and a resource for those outside the field who wish to identify the best micropump for a particular application. Reciprocating displacement micropumps have been the subject of extensive research in both academia and the private sector and have been produced with a wide range of actuators, valve configurations and materials. Aperiodic displacement micropumps based on mechanisms such as localized phase change have been shown to be suitable for specialized applications. Electroosmotic micropumps exhibit favorable scaling and are promising for a variety of applications requiring high flow rates and pressures. Dynamic micropumps based on electrohydrodynamic and magnetohydrodynamic effects have also been developed. Much progress has been made, but with micropumps suitable for important applications still not available, this remains a fertile area for future research.read more
Citations
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Journal ArticleDOI
Lateral cavity acoustic transducer.
Armando R. Tovar,Abraham P. Lee +1 more
TL;DR: A lateral cavity acoustic transducer capable of pumping and mixing fluids within a microfluidic system using an acoustic energy source from an external piezoelectric buzzer is presented.
Journal ArticleDOI
Design, Fabrication, and Characterization of a Rotary Micromotor Supported on Microball Bearings
TL;DR: In this article, a rotary micromotor supported on microball bearings is presented, achieving a top angular velocity of 517 r/min, corresponding to the linear tip velocity of 324 mm/s, at plusmn150-V and 800-Hz excitation.
Journal ArticleDOI
Towards practical sample preparation in point-of-care testing: user-friendly microfluidic devices.
TL;DR: This review introduces an overview of user-friendly microfluidic devices for practical sample preparation in POCT, including self- and hand-operated microfluidity devices, and provides future perspectives to realize user- friendly integrated micro fluidic circuits for wider applications with the integration of simple microfluideic valves.
Journal ArticleDOI
BioMEMS in drug delivery.
TL;DR: As these technologies continue to develop and capitalize on their simpler integration with other MEMS-based systems such as computer controls and telemetry, BioMEMS' impact on the field of drug delivery will continue to increase.
Journal ArticleDOI
Lateral air cavities for microfluidic pumping with the use of acoustic energy
TL;DR: In this article, an acoustically activated micropump is fabricated and demonstrated using a single step lithography process and an off-chip acoustic energy source using angled lateral cavities with trapped air bubbles, acoustic energy is used to oscillate the liquid-air interface to create a fluidic driving force.
References
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TL;DR: In this paper, the authors discuss the nature and properties of liquid interfaces, including the formation of a new phase, nucleation and crystal growth, and the contact angle of surfaces of solids.
Journal ArticleDOI
Monolithic microfabricated valves and pumps by multilayer soft lithography
TL;DR: An extension to the soft lithography paradigm, multilayersoft lithography, with which devices consisting of multiple layers may be fabricated from soft materials is described, to build active microfluidic systems containing on-off valves, switching valves, and pumps entirely out of elastomer.
Journal ArticleDOI
High-performance heat sinking for VLSI
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Journal ArticleDOI
Silicon as a mechanical material
TL;DR: This review describes the advantages of employing silicon as a mechanical material, the relevant mechanical characteristics of silicon, and the processing techniques which are specific to micromechanical structures.