B
Bahman Soltani Hosseini
Researcher at Ibaraki University
Publications - 2
Citations - 27
Bahman Soltani Hosseini is an academic researcher from Ibaraki University. The author has contributed to research in topics: Wafer & Grinding. The author has an hindex of 2, co-authored 2 publications receiving 25 citations.
Papers
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Journal ArticleDOI
Fabrication and evaluation for extremely thin Si wafer
Libo Zhou,Bahman Soltani Hosseini,Tatsuya Tsuruga,Jun Shimizu,Hiroshi Eda,Sumio Kamiya,Hisao Iwase,Yoshiaki Tashiro +7 more
TL;DR: In this paper, a new index for evaluation of the degree of subsurface damage (DSD) was proposed, which is easily calculated via the external geometry of the ground wafer.
Book ChapterDOI
Study on Subsurface Damage Generated in Ground Si Wafer
Bahman Soltani Hosseini,Libo Zhou,Tatsuya Tsuruga,Jun Shimizu,Hiroshi Eda,Sumio Kamiya,Hisao Iwase +6 more
TL;DR: In this paper, the subsurface damage of ground wafers to understand the effect of residual stress on the wafer deflection was studied and the experimental results showed that two indexes of depth of the damaged layer and degree of the residual stress are directly associated with the warpage of wafer.